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FLS110
Product code
FLS110
Manufacturer
The strengths of the product are:
- Silicon-MEMS thermal mass flow sensor
- Firmware running on a standard microcontroller delivers digital flow and differential pressure sensing solutions
- Fully temperature-compensated readings
- Measures to 500 slm or more in bypass flow configurations
- Firmware-programmable operating modes and features
- Ultra-small surface mount package
- Fully compatible with SMD assembly processes
Dimension
3.5 x 3.5 x 3
Flow range
200 sccm – 500 slm
Target Gas
Air
Operating temperature
-20° +85°