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The Axetris MFD range of mass flow meters and controllers allows a flow control up to 20.000 sccm. The new innovation from Axetris allows you to use a single mass flow device over a wide range of flow rates, helping you save costs, while taking the complexity out of design and logistics.
This range of products comes in surprisingly compact sizes, enabling compact designs.
Flow Range: 0 – 20,000 sccm
Flow Accuracy: ± 0.2 % F.S.2 / ± 1 % O.R.3
Repeatability: ± 0.015 % F.S.2 / ± 0.15 % O.R.3
Resolution: 0.01% F.S.2
Dimensions: 50 x 22 x 52 mm (OEM Mass Flow Controller)